This course provides a basic knowledge of fabrication processes for semiconductor devices and integrated circuits. Also, a side-view to the fabrication instrumentations!

The major topics will be covered:

1. Introduction to microelectronic fabrication
2. Crystal growth and preparation of silicon wafers
3. Introduction to material characterization
4. Cleaning processes
5. Lithography
6. Thermal oxidation
7. Dopant diffusion
8. Ion Implantation and rapid thermal processing
9. Etching
10. Deposition (Chemical and Physical)
11. Process integration and future trends